Semiconductor Engineering
نویسندگان
چکیده
منابع مشابه
Semiconductor Engineering .:. Darker Silicon
As most readers already know, however, there was a limit. Smaller devices with thinner dielectrics and shorter channels are more prone to leakage. Indeed, leakage, negligible for much of the industry’s history and ignored in Dennard’s original paper (http://ieeexplore.ieee.org /xpl/articleDetails.jsp?reload=true&arnumber=4785543), now approaches the same order of magnitude as the circuit’s dyna...
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Titanium nitride (TiN) not only was utilized in the wear-resistant coatings industry but it was also adopted in barrier processes for semiconductor manufacturing. Barrier processes include the titanium (Ti) and TiN processes, which are commonly used as diffusion barriers in via/contact applications. However, engineers frequently struggle at the via/contact module in the beginning of every techn...
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ژورنال
عنوان ژورنال: Nature
سال: 1970
ISSN: 0028-0836,1476-4687
DOI: 10.1038/225771b0